Parylene, being a coating material Authorized by FDA with high purity, chemical inertness and Biocompatibility, is used for various kinds of implantation. The parylene improve the device lubricity on the surface and Biocompatibility, increasing the reliability. Instead of heating and solidification, the film is formed at the room temperature and no catalyst is needed. Thus, biosensor, nail, bone lamella and cardiac pacemaker will have better Biocompatibility, which will be more reliable in the biotic environment.