Parylene coating contains not only excellent dielectric properties, low dielectric loss and high dielectric strength but also good mechanical properties and corrosion resistance. Based on its superior dimensional stability and cryogenic property, the device with parylene can withstand high breakdown voltages like 1.5KV, 2.0 KV and even 10KV voltage without changing the dimension, Applying high purity Parylene as a passivation layer and dielectric layer can offer quite a safe and reliable protection.